氢气与Cu中间层对GZO薄膜光电性能的影响
Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film
Fig. 1 Resistivity, carrier concentration, and Hall mobility of GZO films as a function of H 2 flow at room temperature
氢气与Cu中间层对GZO薄膜光电性能的影响 |
| 吕坤, 祝柏林, 李珂, 胡文超, 谢铭, 吴隽 |
Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film |
| 图 1 在室温下H 2 流量对GZO薄膜电阻率、载流子浓度和霍尔迁移率的影响 Fig. 1 Resistivity, carrier concentration, and Hall mobility of GZO films as a function of H 2 flow at room temperature |
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